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$340.00 Each
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Auto Switch
w/o Auto Switch and w/o Built-in Magnet
Body surface treatment
Raw Material
Flange size
16
Flange type
KF(NW)
Lead Wire
0.5m (Or None in the Case of No Auto Switch)
Non-standard indicator
Standard
Port direction
w/o Indicator, Flange Side
Seal material
FKM (1349-80)
Temperature
5 to 60°C
Version
2 (Refresh)
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
- Air pressure applied to pilot port shifts opens piston-coupled valve
- Numerous maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4-directions
- Optional 100°C to 150°C heaters (UL compliant lead wire)
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